The EB series is our flagship probe station product line. It’s features and foundation are solid for providing repeatable, accurate measurements in both DC and RF applications. :

Features

Low profile coaxial-driven style stage (optional large knob precision stage)

Back-lash free movement

Mounting for 12 micropositioners

4.5” Probe Card Holder compatible

Micropositioner Standby Dock

Microscope Tilting for E-Z lens switching

Applications

Basic IV/CV

RF, Single Broadband Probing

High Voltage, High Current

Accessories

Hot Chuck with Temperature Controller

Vibration Free Table

Shielding Box

Station Specifications:

Station Footprint                                           580 mm W x 460 mm D

Station Height                           450 mm (to Platen)/700 mm (to Microscope)

Station Weight 60kg

Platen Material                                          Hard Chrome Plated Steel

Platen Dimension                                      250 mm Inner, 450mm Outer

Platen Capacity                                               12 DC or 4 RF 4 DC

Positioner Mount                                         Magnetic ON/OFF Switch

No. of Vacuum Switches 4

Chuck Material                                                    Stainless Steel

Chuck Stage Type                                    Coaxial (Large Knob Optional)

Chuck Travel Range                                                       6” x 6”

Chuck Quick Resolution                                                25 mm/rev

Chuck Fine Resolution                                                      1 μm

Chuck Theta Coarse Travel                                                  360˚

Chuck Theta Fine Resolution                                                0.01˚

Chuck Z-Motion                                                     4 mm Range

Chuck Z Fine Resolution                                                    1 μm

Coaxial Chuck Movement                       Bevelled Gear and Rack 0.8mm Pitch

Large Knob Chuck Movement                            High Precision Linear Stage

Chuck Size 4”, 6”, 8”, 10”, 12”

Chuck Planarity                                                            3 μm

Chuck Rigidity                                               15 μm / 10 N @ edge

Chuck Vacuum Grooves                    Center, 1.5”, 3” ,5” (Individually Controlled)

Chuck Bias Capacity                                                   Up to 2 kV

Chuck Isolation 5 GΩ

DUT Size Range                                                  2 mm - 150 mm

Microscope Stage Travel Range                                             2” x 2”

Microscope Zoom Range                                                  1x - 5x

Microscope Eye Piece                                                       20x

Microscope Magnification Range                                         20x-100x