Everbeing tailors each mmW probe station to significantly minimize signal losses between probe and measurement instrument by connecting waveguide and flange directly. Our special micropositioners provides the best rigidity to safely perform probe landings.

EB-6V mmW Probe Station

The EB-6V probe station is designed for all frequency extenders such as those from VDI, OML, R&S, Keysight, Anritsu. If you are using an Anritsu VNA VectorStar ME7838A4 model, or commonly Anritsu 3743A mmW Extenders and related sizes, the station of interest is the EB-6A

Features

- Customized positioners to reduce waveguides between millimeter-wave modules and probe head

- Firm and stable positioners for extenders and tuners of all sizes

- Integrated dial gauge determining contact scratch on probes

- Precise integration allowing direct link of probes

- North and south bridge for additional DC and RF micropositioners

- Coaxial style high precision stage

- Back-lash free movement

- Micropositioner Standby Dock

Applications

- High Performance RF

- Single Broadband Probing

- Differential mm-Wave

- Basic DC (IV/CV)

Accessories

- Hot Chuck with Auxiliary Chuck with Temperature Controller

- Vibration Free Table

- Shielding Box

Station Specifications:

Station Footprint                                           760 mm W x 660 mm D

Station Height                           450 mm (to Platen)/700 mm (to Microscope)

Station Weight                                                             80kg

Platen Material                                          Hard Chrome Plated Steel

Platen Dimension                              120 mm x 180 mm (North and South)

Platen Capacity                                    4 DC and 2 RF or 2 DC and 4 RF

Positioner Mount                                         Magnetic ON/OFF Switch

No. of Vacuum Switches                                                        4

Platen Z-Motion Range                                            6mm Pneumatic

Chuck Material                                                    Stainless Steel

Chuck Stage Type                                                        Coaxial

Chuck Travel Range                                                       6” x 6”

Chuck Fine Resolution                                                      1 μm

Chuck Theta Coarse Travel                                                  360˚

Chuck Theta Fine Resolution                                                0.01˚

Chuck Z-Motion Range                                                     4 mm

Chuck Z-Fine Resolution                                                    1 um

Coaxial Chuck Movement                      Bevelled Gear and Rack 0.8 mm Pitch

Chuck Size                                                                   6”

Chuck Planarity                                                            3 μm

Chuck Rigidity                                               15 μm / 10 N @ edge

Chuck Vacuum Grooves                  Center, 1.5”, 3.5”, 7” (Individually Controlled)

Chuck Bias Capacity                                                   Up to 2 kV

Chuck Isolation                                                            5 GΩ

DUT Size Range                                                  2 mm - 150 mm

Microscope Stage Type                                 High Precision Linear Stage

Microscope Stage Resolution                                                 1um

Microscope Stage Travel Range                                             2” x 2”

Microscope Z-Li_(Optional)                                      6 mm (Pneumatic)

Microscope Zoom Range                                                 1.4x - 9x

Microscope Eye Piece                                                        30x

Microscope Trinocular Port                                    C-Mount, 2x Adapter

Microscope Magnification Range                                         42x-270x