The Chamber Plus probe station offers a sealed environment for an oxygen-free environment and double as a Faraday cage enclosure for extreme limits for probing. While the DUT is enclosed within the chamber, all probing operations such as chuck stage movement, micropositioning, are still readily available. With this product you can achieve the following into your test:

Temperature range within -60˚C to 400˚C (Optional 500˚C from RT)

Low leakage currents down to 20 fA

RF probing up to 67 GHz or higher depending on VNA

Station Specifications:

Station Footprint                                           760 mm W x 660 mm D

Station Height                           450 mm (to Platen)/700 mm (to Microscope)

Station Weight                                                             80kg

Platen Material                                          Hard Chrome Plated Steel

Platen Dimension                                      250 mm Inner, 450mm Outer

Platen Capacity                                                8 DC or 4 RF 4 DC

Positioner Mount                                         Magnetic ON/OFF Switch

No. of Vacuum Switches                                                        4

Platen Z-Motion Range                                            6mm Pneumatic

Platen Z-Fine Resolution                                                     1um

Platen Z Movement                             Gear and Belt (Fine), Lever (Coarse)

Chuck Material                                                    Stainless Steel

Chuck Stage Type                                 Large Knob Precision Movement

Chuck Travel Range                                                       6” x 6”

Chuck Quick Movement              Quick Y Rail Movement for Easy Sample Loading

Chuck Fine Resolution                                                      1 μm

Chuck Theta Coarse Travel                                                   20˚

Chuck Theta Fine Resolution                                                0.01˚

Large Knob Chuck Movement                            High Precision Linear Stage

Chuck Size                                                                6”, 8”

Chuck Planarity                                                            3 μm

Chuck Rigidity                                               15 μm / 10 N @ edge

Chuck Vacuum Grooves                Center, 0.5”, 1.5”, 2.5” (Individually Controlled)

Chuck Bias Capacity                                                   Up to 2 kV

Chuck Isolation                                                            5 GΩ

DUT Size Range                                                  2 mm - 150 mm

Microscope Stage Type                                 High Precision Linear Stage

Microscope Stage Resolution                                                 1um

Microscope Stage Travel Range                                             2” x 2”

Microscope Tilting (Optional)                                                  35˚