Celebrating over 25 years of manufacturing probe stations and micro positioners the C-Series are one of the world’s most popular and affordable, yet built with precision and repeatability.

Station Specifications:

Station Footprint                                           580 mm W x 460 mm D

Station Height                           450 mm (to Platen)/700 mm (to Microscope)

Station Weight                                                             40kg

Platen Material                                          Hard Chrome Plated Steel

Platen Dimension                                      250 mm Inner, 450mm Outer

Platen Capacity                                               12 DC or 4 RF 4 DC

Positioner Mount                                         Magnetic ON/OFF Switch

No. of Vacuum Switches                                                        3

Chuck Material                                                    Stainless Steel

Chuck Stage Type                                    Coaxial (Large Knob Optional)

Chuck Travel Range                                                       6” x 6”

Chuck Quick Resolution                                                25 mm/rev

Chuck Fine Resolution                                                      1 μm

Chuck Theta Coarse Travel                                                  360˚

Chuck Z-Motion                                                     4 mm Range

Chuck Z Fine Resolution                                                    1 μm

Coaxial Chuck Movement                       Bevelled Gear and Rack 0.8mm Pitch

Large Knob Chuck Movement                            High Precision Linear Stage

Chuck Size 4”, 6”, 8”

Chuck Planarity                                                            3 μm

Chuck Rigidity                                               15 μm / 10 N @ edge

Chuck Vacuum Grooves                     Center, 1”, 3” ,5” (Individually Controlled)

Chuck Bias Capacity                                                   Up to 1 kV

Chuck Isolation                                                            2 GΩ

DUT Size Range                                                  2 mm - 150 mm

Microscope Zoom Range                                                  1x - 5x

Microscope Eye Piece                                                       20x

Microscope Magnification Range                                         20x-100x