Best for DC and RF probing, the platen lift is designed for smooth raise and contact of your probes simultaneously to your device. It is ideal for probing multiple spots on your device, or through multiple devices.
Everbeing’s BD complete probe station offer the most functions for accurate, repeatable probing.

Features

- Large Knob High Precision Stage

- Back-lash free movement

- Mounting for 12 micropositioners

- 4.5” Probe Card Holder compatible

- Platen Height Adjustable

- Micropositioner Standby Dock

- Microscope Tilting for E-Z lens switching

Applications

- Basic IV/CV

- RF, Single Broadband Probing

- High Voltage, High Current

Accessories

- Hot Chuck with Temperature Controller

- Vibration Free Table

- Shielding BoxStation

Specifications:

Station Footprint 760 mm W x 660 mm D

Station Height                           450 mm (to Platen)/700 mm (to Microscope)

Station Weight 80kg

Platen Material                                          Hard Chrome Plated Steel

Platen Dimension                                     250 mm Inner, 450mm Outer

Platen Capacity 12 DC or 4 DC and 4RF

Positioner Mount                                         Magnetic ON/OFF Switch

No. of Vacuum Switches 4

Platen Z-Motion Range 25 mm (Fine), 6 mm (Coarse)

Platen Z-Fine Resolution                                                    1 um

Platen Z Movement                            Gear and Belt (Fine), Lever (Coarse)

Chuck Material                                                    Stainless Steel

Chuck Stage Type                                 Large Knob Precision Movement

Chuck Travel Range                                                       6” x 6”

Chuck Quick Movement              Quick Y Rail Movement for Easy Sample Loading

Chuck Fine Resolution                                                      1 μm

Chuck Theta Coarse Travel 360˚

Chuck Theta Fine Resolution                                                0.01˚

Large Knob Chuck Movement                            High Precision Linear Stage

Chuck Size                                                                   6”

Chuck Planarity                                                            3 μm

Chuck Rigidity                                               15 μm / 10 N @ edge

Chuck Vacuum Grooves                Center, 0.5”, 1.5”, 2.5” (Individually Controlled)

Chuck Bias Capacity                                                   Up to 2 kV

Chuck Isolation 5 GΩ

DUT Size Range                                                  2 mm - 150 mm

Microscope Stage Type                                 High Precision Linear Stage

Microscope Stage Resolution                                                 1um

Microscope Stage Travel Range                                             2” x 2”

Microscope Tilting (Optional)                                                  35°

Microscope Zoom Range                                                  1x - 5x

Microscope Eye Piece 20x

Microscope Magnification Range 20x-100x