Specifications:

Voltage: AC220 V

Flow rate: 7L / min

Vacuum: - 60kpa

Mass: 0.7kg

Function:

Provide vacuum power source.

Fix wafer or device sample with vacuum adsorption hole on chuck

Fix the probe base on the platform with the vacuum adsorption probe base

Characteristic:

Oil free and quiet, especially suitable for laboratory and clean room

7 L / min flow, 24-hour uninterrupted operation